Support
Every System, Supported for Life
From thin film metrology and material characterization to precision wet process lines, our field service and applications teams keep every Toho system running at specification. Toho technicians support customers directly in North America, Japan, and China. Everywhere else, trained technicians from our distribution partners support Toho equipment with custom tools and calibration systems.
What We Offer
Service Programs Across the Equipment Lifecycle
Field Service
On-site installation, repair, and preventive maintenance by factory-trained technicians.
Calibration
Verification against certified reference standards, with documented results for your quality system.
Training
Structured training for new operators and advanced sessions for process engineers.
Parts and Upgrades
Replacement probes, components, and upgrades, stocked at our depots in the US, Japan, and China.
Applications Help
Applications engineers review unexpected results and help isolate sample, recipe, or system causes.
Sample Demos
Your samples measured on the system under evaluation, in California, Chicago, Japan, or Shanghai.
Our Commitment
Same Attention After the Warranty Ends
We recognize that our customers expect capital equipment to function reliably in the long term with a minimum of maintenance needs. For this reason we are committed to supporting our customers and their equipment for the entire lifespan. Customers can expect to receive the same level of attention, support, and expediency in handling service requests after the warranty ends as they did during the sales process and warranty period.
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Asia-based manufacturing, global team
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Tariff protected, ships from Japan
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World-renowned Japanese quality assembly
Installation
Every Toho System Is Installed by Our Own Field Service Team
Our trained field service professionals personally install every Toho system. Installations range from the simple one-day installation of a bench-top metrology tool to the complex month-long process of integrating a wet process system into an automated factory environment.
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Trained technicians ready to install or support
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Installation
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Training
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Preventative maintenance
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Spare parts sourcing
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Remote access troubleshooting
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On-site repair and service
Regions Covered
Service Wherever Your Tool Is
Toho technicians provide direct support in North America, Japan, and China. In all other regions, trained technicians from our distribution partners, equipped with custom tools and calibration systems, support Toho equipment around the globe.
India
El Camino Technologies
All Toho Tools except FLX
Annual Maintenance
A Yearly Visit Means Fewer Repair Calls
Our experience has proven that capital equipment maintained annually requires fewer service requests for repairs, parts, and maintenance. Preventative maintenance procedures and schedules are covered in the training and installation of all Toho equipment. Regular maintenance performed by Toho service technicians minimizes problems and maximizes Mean Time Between Failure, ensuring a lifetime of reliable and productive use. Toho offers on-call service as well as extended warranty contracts tailored to the specific needs of each customer’s operation.
Typical PM Visit Checklist
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Verify integrity of customer-owned standards
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Perform certified standard calibration tests
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Check all power supply voltage levels
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Verify integrity of all connections, cables and board interface
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Verify optical / light source alignment and output
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Check integrity of all safety interlocks
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Defrag hard disk
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Clean all moving components
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Lubricate all moving components
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Other customer needs and issues as applicable
Consumables
Lamps, lasers, filters, sealing rings, O-rings, quartz plates, fuses, and probe tips.
Minor Parts
Cables, circuit boards, covers, sensors, switches, fans, power supplies, and vacuum fittings.
Major Parts
Motors, stages, robotics, optical heads, controllers, chucks, and heater assemblies.
Spare Parts
Parts in Stock, and Help Finding the Rare Ones
Consumable parts that need replacement over time, such as lasers and quartz plates, are kept in stock at our Chicago office. Other parts and equipment are kept in stock at our manufacturing facilities in Japan and China. We utilize a network of vendors in the US, Europe, China, Korea, and Japan to source difficult-to-find parts and unique fixtures. With our Japanese- and Chinese-speaking staff, custom material procurement services are also available.
Global compliance: NFPA-79, SEMI S2, S8, S14, CE
Questions
Frequently Asked Questions
Yes. Our systems are installed worldwide. Many issues are resolved through remote diagnostics, with on-site service provided directly or through certified regional partners.
In most cases. Provide the model and serial number and we will confirm parts availability and supported service options.
Yes. Samples sent to our Chicago lab are measured on the system under evaluation, and results are returned with an applications summary.
Yes. Service agreements are tailored to tool utilization and uptime requirements, including preventive maintenance, on-call service, and extended warranty coverage.