Toho FPM Series tools are designed to provide accurate measurements within a vast array of applications.
FPM systems and their measurement data are used to improve production yield especially in, Color Filter, TFT process lines and ODF (One Drop Fill) processes. Height and width, area data of Photo Spacer and VA structure, Black Matrix, and Color Filter can be measured at one time with our proprietary OneShotTM system. SureShotTM provides Halftone process feature measurement such as film thickness and Critical Dimensions. DropShot TM also provides droplets volume and shape.