Solutions We Provide
Metrology, Wet Process, and Automation Solutions Backed by Applications Expertise
Each system is supported through installation, operator qualification, and ongoing applications support for the life of the tool, backed by applications engineering teams in Sacramento, Japan, China, and Europe.
Thin Film Metrology
Laser-based film stress measurement with the FLX series and spectroscopic film thickness measurement with the TohoSpec 3100.
See FLX and TS3100
General Metrology
Non-contact optical profilers built on Zygo white light interferometry, and stylus contact profilers for step height and surface roughness.
See FPM and FP Profilers
Material Characterization
Electrochemical CV doping profiles with the ECVPro+ and carrier concentration and mobility with the HL9900 Hall effect system.
See ECVPro+ and HL9900
Resistivity
The Napson resistivity line, in contact 4 point probe and non-contact eddy current versions, from handheld meters to fully automatic wafer sorters.
See Resistivity Tools
Glass Wet Process
Precision Etching, one wet process platform for cleaning, etching, stripping, and developing glass substrates, in in-line and spin configurations.
See Precision Etching
Automation
Factory automation components from Toho in Japan: TOLINE multiplex transmission, relay boxes, interface terminals, terminal blocks, and PLC retrofit adapters.
See Automation Components
Who Uses Our Tools
Serving Production and Research Environments
Our systems run in volume fabs, panel lines, and university labs on every continent.
Semiconductor and Electronics
-
Logic and memory fabs
-
Compound semiconductors
-
Power devices
-
MEMS and sensors
-
LED and optoelectronics
Typical tools
Display and Glass
-
Flat panel display
-
Dynamic (smart) glass
-
Touch panel and coated glass
-
Glass substrate suppliers
Typical tools
Energy and Materials
-
Solar and photovoltaics
-
Silicon ingot and wafer suppliers
-
Thermoelectric materials
-
Thin-film battery research
Typical tools
Research and Industrial Labs
-
University research labs
-
National laboratories
-
Aerospace and defense
-
Automotive and EV
-
Optical coatings
Typical tools
Contract Manufacturing
Built in Japan. Managed from Chicago.
Contract manufacturing for U.S. OEMs building metrology and inspection systems, electro-mechanical assemblies, and other high-complexity, low-volume systems. Our ISO 9001 and ISO 14001 certified factories in Japan put engineering and assembly under one roof, and our Chicago team manages your program in your time zone.
Why OEMs Build with Toho
-
Asian manufacturing without China risk
-
Over 100 in-house engineers for DFM and redesign
-
Cumulative field defect rate under 0.75%, 2022–2025
-
Class 100 cleanroom and bays for large systems
1829
Nagoya, Japan
A Legacy of Innovation
For 200 years, Toho Technology has remained dedicated to excellence, innovation and outstanding service. Through continuous and intentional investment in people and technology, we are relentless in our quest to provide solutions to the challenges of tomorrow.
Founded by the Tomita family in 1829, the Toho Group has grown from a trading company into a manufacturer of industrial electronics, automation, and inspection systems. Toho Technology Inc. was established in Chicago in 2001 to serve customers across the Americas and worldwide.
Find the Right Measurement Solution
Share your material system, substrate size, and measurement requirements. Our team of Applications Engineers and Material Scientists will recommend a configuration and support a demonstration on your samples.