FP Series

Large Area Contact Profilometry

This is custom Toho custom profilers offer comprehensive measurement capabilities for mass production and research facilities that demand accuracy, performance, and value.
Incorporating KLA-Tencor’s proprietary low-force measurement head, Toho Profilers provide low stylus force and achieve highly accurate micron to nanometer range measurements to analyze surface flatness, surface roughness, waviness, peak to valley, curvature, texture, stress, and feature dimensions on any square FPD substrate larger than 300mm.

Applications

Toho Profilers are designed to provide accurate profile measurements within applications geared toward FPD large surface area substrates.

  • Thin film heights
  • Thick film heights
  • Photo resist / soft films
  • Characterization of surface roughness or waviness
  • Surface Curvature and form
  • 2D stress on thin films
  • Peak to Valley Dimension analysis
  • 3D imaging
  • Flatness
  • Defect Analysis

Specifications

G4 or smaller sample size

Performance

Stylus Force Resolution

0.05 mg

Scan Repeatability

10Å (at stage center)

X and Y Repeatabilitiy

± 2 µm

Pattern Recognition

Manual (Auto / option)

Magnification Lens

185 x 0 – 360 degree

Noise Isolator

Equipped (Passive or Active)

Scan Length

Max 30 mm

Scan Speed

1µm / sec ~ 25mm / sec

Sampling Rate

50 / 100 / 200 / sec

Throat Height

15 mm

Vertical Range

0 – 130 µm

L – Stylus

2 µm / 60 degrees

Stylus Force

0.5 mg – 15 mg

Hardware Configuration

Sample Size (mm)

300mm to 880mm

X, Y movement

Moving Stage (X, Y)  Lead screw + DC servo motor

Z movement

Slide block + LM guide

THETA movement

Wheel & Wormgear + DC servo motor

Facilities Requirements

Dimensions

1300 x 1300mm

Weight

800kg

Electrical

1φ100V-200V±10%

CDA

15L/min

Vacuum

15L/min

Floor condition

VC-D

dependant on sample size

G4.5 or larger sample size

Performance

Stylus Force Resolution

0.05 mg

Scan Repeatability

15Å (at any location)

X and Y Repeatabilitiy

± 2 µm

Pattern Recognition

Auto

Magnification Lens

185 x  0 – 90 / -90 degrees

Noise Isolator

Equipped (Passive or Active)

Scan Length

Max 30 mm1

Scan Speed

1µm / sec ~ 25mm / sec

Sampling Rate

50 / 100 / 200 / sec

Throat Height

15 mm

Vertical Range

0 – 130 µm

L – Stylus

2 µm / 60 degrees

Stylus Force

0.5 mg – 15 mg

30mm available only when Stress option is included. With no stress option, scan length is 10mm.

Hardware Configuration

Sample Size (mm)

920mm  to 3080mm

X, Y movement

Moving Stage (X) & Moving Head (Y)  Scale + AC servo motor

Z movement

Slide block + LM guide + Million guide

THETA movement

Built-in motor guide + AC servo motor

Facilities Requirements

Dimensions

2300 x 2400mm

Weight

5500kg

Electrical

3φ200V±10%

CDA

250L/min

Vacuum

30L/min

Floor condition

VC-C

dependant on sample size

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