This is custom Toho custom profilers offer comprehensive measurement capabilities for mass production and research facilities that demand accuracy, performance, and value.
Incorporating KLA-Tencor’s proprietary low-force measurement head, Toho Profilers provide low stylus force and achieve highly accurate micron to nanometer range measurements to analyze surface flatness, surface roughness, waviness, peak to valley, curvature, texture, stress, and feature dimensions on any square FPD substrate larger than 300mm.
Toho Profilers are designed to provide accurate profile measurements within applications geared toward FPD large surface area substrates.
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Stylus Force Resolution |
0.05 mg |
|
Scan Repeatability |
10Å (at stage center) |
|
X and Y Repeatabilitiy |
± 2 µm |
|
Pattern Recognition |
Manual (Auto / option) |
|
Magnification Lens |
185 x 0 – 360 degree |
|
Noise Isolator |
Equipped (Passive or Active) |
|
Scan Length |
Max 30 mm |
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Scan Speed |
1µm / sec ~ 25mm / sec |
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Sampling Rate |
50 / 100 / 200 / sec |
|
Throat Height |
15 mm |
|
Vertical Range |
0 – 130 µm |
|
L – Stylus |
2 µm / 60 degrees |
|
Stylus Force |
0.5 mg – 15 mg |
|
Sample Size (mm) |
300mm to 880mm |
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X, Y movement |
Moving Stage (X, Y) Lead screw + DC servo motor |
|
Z movement |
Slide block + LM guide |
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THETA movement |
Wheel & Wormgear + DC servo motor |
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Dimensions |
1300 x 1300mm |
|
Weight |
800kg |
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Electrical |
1φ100V-200V±10% |
|
CDA |
15L/min |
|
Vacuum |
15L/min |
|
Floor condition |
VC-D |
2 dependant on sample size
|
Stylus Force Resolution |
0.05 mg |
|
Scan Repeatability |
15Å (at any location) |
|
X and Y Repeatabilitiy |
± 2 µm |
|
Pattern Recognition |
Auto |
|
Magnification Lens |
185 x 0 – 90 / -90 degrees |
|
Noise Isolator |
Equipped (Passive or Active) |
|
Scan Length |
Max 30 mm1 |
|
Scan Speed |
1µm / sec ~ 25mm / sec |
|
Sampling Rate |
50 / 100 / 200 / sec |
|
Throat Height |
15 mm |
|
Vertical Range |
0 – 130 µm |
|
L – Stylus |
2 µm / 60 degrees |
|
Stylus Force |
0.5 mg – 15 mg |
1 30mm available only when Stress option is included. With no stress option, scan length is 10mm.
|
Sample Size (mm) |
920mm to 3080mm |
|
X, Y movement |
Moving Stage (X) & Moving Head (Y) Scale + AC servo motor |
|
Z movement |
Slide block + LM guide + Million guide |
|
THETA movement |
Built-in motor guide + AC servo motor |
|
Dimensions |
2300 x 2400mm |
|
Weight |
5500kg |
|
Electrical |
3φ200V±10% |
|
CDA |
250L/min |
|
Vacuum |
30L/min |
|
Floor condition |
VC-C |
2 dependant on sample size
