Precision Stripping

Best in Class Practices Cutting Edge Methodologies

Toho Precision Strippers

For over 3 decades, Toho Technology has developed, produced and innovated Wet Process systems to meet the ever changing and stringent demands of the Displays and Medical Imaging markets. Precision removal of Photo Resist with dynamic processes and industry standard chemistry from leaders like Parker, Lion, AZ, TOK, Semiclean have has been a core part of Toho’s Wet Process operation. Built specifically for the stringent demands of the FPD industry, Toho Strippers feature dry-in/dry-out process flow with superior Strip results and ultra-clean substrates at the final un-load stage. Fully programmable, in-situ process monitoring allows for comprehensive Strip control for accurate and uniform results. Toho Technology Wet Process Solutions offer outstanding value with additional benefits that make Toho the clear best choice for long term intensive performance.

Cutting Edge Wet Process Methodologies

Toho’s worldwide experience boasts an installed base of over 300 Precision Wet Tools for various applications. This allows Plant Managers and Process Engineers alike to benefit from “best in class practices” and cutting edge Wet Process methodologies. The common modular process configurations below are enhanced and customized to meet budget and application needs while taking advantage of second to none quality manufacturing and “kaizen” production methods developed in Japan for the Asian Flat Panel Display industry.

Common Modular Process Configuration

1. Robot Load / Un-load, Manual Load, Indexed Elevator, Loader Conveyor

2. Cassette / Panel ID Read, Record

3. Conveyance system with lateral guides

4. Buffer to prevent cross contamination

5. Strip Chamber featuring Spray and Immersion processes

6. Cascade Rinse with separate supply of the final cascade module

7. Final DIW Rinse

8. Air Knife high pressure CDA or N2

9. Un-Load

10. Auxiliary Components

Control Cabinet
Chemical Distribution Unit
Chiller

Strip Chamber Features

• Aqua Knife sprays Strip Agent and DIW to pre condition the panel

• Rocking Shower™ Etchant dispersed from high pressure nozzles

Nozzle motion in criss-cross or zig-zag pattern,
Combination of Swing Nozzle / Panel Oscillation

• DIP Tank

Full panel Immersion in etchant
Programmable temperature control
Panel Slope / Panel oscillation for large panels
Substrate Swing

• Air-cut chemical removal

• Quench Rinse

• Optional Process Configurations

• HEPA filtration

• Bacteria Prevention systems to stop water born contaminants

• Concentration Monitor

• Ionizers in critical ESD control areas – Unload module

• Safety light curtains at openings

• CIM / Host PC interface

Toho Quality Build

• Modular PP Construction

• Easy access Maintenance openings

• Double glass covers

• Fully enclosed Process Chambers

• Positive air pressure

• Built in exhaust

• Multiple safety interlocks, leak sensors, exhaust sensors, over-heat, dry pump and other built in safety systems

• All piping, labeled for flow directions, pressure, etc.

• All wiring labeled and clearly marked out

Customized for Different Applications

Toho realizes that while some applications are focused on nanometer precision, others demand robust throughput at economical price points. All Toho Etch tools are customized to meet virtually any footprint, substrate size and thickness. Some examples of common FPD Strip Applications and Chemistry that Toho has experience with are listed below.

WET PROCESS EQUIPMENT Precision Stripping

Process Configuration	Strip Agent	Film	Panel Size
Spray Shower	TOK 104	Photo Resist	307 x 470 x 1.1
Spray Shower and Ultrasonic Immersion	Parker	Polyimide	1100 x 1300 x 0.7
Spray Shower and Ultrasonic Immersion	Semiclean	Polyimide	1500 x 1850 x 0.5
Spray Shower	Hayashi SPX	Photo Resist	1100 x 1300 x 0.7
Spray Shower	KOH	Polyimide	2160 x 2460 x 0.7

Long Term Value

All Toho Wet StripTools are Simple to Operate and feature easy to understand user interface, gauges, and fully labeled components. Toho Technology Wet Process Solutions offer outstanding value with additional benefits that make Toho the clear best choice for long term value and performance. High-performance Stripping equipment with Toho process technology ensures best Strip results. Process Engineers who select Toho Equipment enjoy product enhancements and benefits such as;

Outstanding Customer Support

• Maintenance & Operations Training at Source & Site acceptance

• Training for all Preventative Maintenance & Repair techniques

• Bilingual Assistance as needed

• Trained Service Technicians on-site during and after installations

• Local US Service Technician Presence

• Optional Remote Access software for troubleshooting and programming assistance

• PLC programming support

• Global Compliance

NFPA codes and regulations, NEC, OSHA
CE Compliance as needed
SEMI S2-93A

Engineered for Quality & Performance

• Designed with Japanese Quality Standards and attention to detail and workmanship

• Low Cost of Ownership with best in class material grades

• User Friendly Software Interface customized to unique applications

• Reduced Environmental impact with noise suppression, filtration systems and re-circulation systems

• N² Purge to Prevent bacteria build up

• ESD Suppression with Ionizer bars at Un-Load

• Automatic Chamber cleaning

• Automatic line purge

Flexible Modular Configurations

• Engineered for throughput, facility requirements

• Full Pre-Assembly Spec Review for customer Engineering and Material changes

• In-line roller conveyor automated systems

• Lower Throughput Applications

• Stand alone systems

• Limited footprint requirements

• Manual Load / Unload

• Bacteria Prevention systems to stop water born contaminants

Modular Design

Based on our experience with complex Wet Process equipment, Toho Technology Wet Process Solutions meet stringent specifications designed for the Flat Panel Display industry but allow for modular customization to fit all applications. While each machine is engineered at the component level to meet individual customer requirements, Toho systems offer outstanding reliability and flexible process control. User Programmable features ensure consistent processing and monitoring while a wide variety of adjustable parameters allow for optimum utilization of Fab assets.