Precision Etching

Uniform Wet Etch Process Fully Programmable, Comprehensive Control

Toho Precision Etching

Toho state-of-the-art equipment and process technology offer high etching rates and consistent results. Toho Technology Glass Etch systems provide a highly uniform wet etch process. Built specifically for the stringent demands of the FPD industry, Toho Etchers feature dry-in/dry-out process flow with superior etches results and ultra-clean substrates at the final un-load stage. Integrated automatic process control systems are standard on all Toho Etching systems. Fully programmable, in-situ process monitoring allows for comprehensive etch control for accurate and uniform results. Toho Technology Wet Process Solutions offer outstanding value with additional benefits that make Toho the clear best choice for long term intensive performance. In-Line and Spin Models for virtually any size glass are available.

Cutting Edge Wet Process Methodologies

Toho’s worldwide experience boasts an installed base of over 300 Precision Wet Tools for various applications. This allows Plant Managers and Process Engineers alike to benefit from “best in class practices” and cutting edge Wet Process methodologies. The common modular process configurations below are enhanced and customized to meet budget and application needs while taking advantage of second to none quality manufacturing and “kaizen” production methods developed in Japan for the Asian Flat Panel Display industry.

Common Modular Process Configuration

1. Robot Load / Un-load, Manual Load, Indexed Elevator, Loader Conveyor

2. Cassette / Panel ID Read, Record

3. Conveyance system with lateral guides

4. Buffer to prevent cross contamination

5. Etch Chamber featuring Spray and Immersion processes

6. Cascade Rinse with separate supply of the final cascade module

7. Final DIW Rinse

8. Air Knife high pressure CDA or N2

9. Un-Load

10. Auxiliary Components

  • Control Cabinet
  • Chemical Distribution Unit
  • Chiller

Etch Chamber Features

Aqua Knife sprays etchant and DIW to pre condition the panel

Rocking Shower™ Etchant dispersed from high pressure nozzles

  • Nozzle motion in criss-cross or zig-zag pattern,
  • Combination of Swing Nozzle / Panel Oscillation

DIP Tank

  • Full panel Immersion in etchant
  • Programmable temperature control
  • Panel Slope / Panel oscillation for large panels
  • Substrate Swing

Air-cut chemical removal

Quench Rinse

Optional Process Configurations

• HEPA filtration

• Bacteria Prevention systems to stop water born contaminants

• Concentration Monitor

• Ionizers in critical ESD control areas – Unload module

• Safety light curtains at openings

• CIM / Host PC interface

Toho Quality Build

• Modular PP Construction

• Easy access Maintenance openings

• Double glass covers

• Fully enclosed Process Chambers

• Positive air pressure

• Built in exhaust

• Multiple safety interlocks, leak sensors, exhaust sensors, over-heat, dry pump and other built in safety systems

• All piping, labeled for flow directions, pressure, etc.

• All wiring labeled and clearly marked out

Customized for Different Applications

Toho realizes that while some applications are focused on nanometer precision, others demand robust throughput at economical price points. All Toho Etch tools are customized to meet virtually any footprint, substrate size and thickness. Common FPD Etch Applications and Etchants that Toho has experience with are listed below.

Material Etched Etchant Utilized                         
ITO Iron Chloride (FeCl2)
Aluminum (HNO3 / CH3COOH / H3PO4)
Chromium Cerium Nitrate
Aluminum BHF
SiO2 (HNO3 / CH3COOH / H3PO4)
ITO Oxalic Acid
Copper (HNO3 / CH3OOH / H3PO4)
Copper H2O2 (5%) + H3PO4 (10-20%)
Titanium F (1%) + Additional Agents (10%)

Industrial Cleaning

• Incoming Clean (removal of packing materials, grease, shards, etc)

• Pre-Process Clean

• Clean Polish & Clean Combination Machines

• Post-Process Clean

Low Throughput Requirements

• Stand Alone Manual Clean

• Spin Clean

• Limited Foot Print “Double Decker” Clean

• Manual Load /Unload

• Bacteria Prevention to eliminate water born contaminants

Long Term Value

All Toho Wet Etch Tools are Simple to Operate and feature easy to understand user interface, gauges, and fully labeled components. Toho Technology Wet Process Solutions offer outstanding value with additional benefits that make Toho the clear best choice for long term value and performance. High-performance Etching equipment with Toho process technology ensures best Etch results. Process Engineers who select Toho Equipment enjoy product enhancements and benefits such as;

Outstanding Customer Support

• Maintenance & Operations Training at Source & Site acceptance

• Training for all Preventative Maintenance & Repair techniques

• Bilingual Assistance as needed

• Trained Service Technicians on-site during and after installations

• Local US Service Technician Presence

• Optional Remote Access software for troubleshooting and programming assistance

• PLC programming support

• Global Compliance

  • NFPA codes and regulations, NEC, OSHA
  • CE Compliance as needed
  • SEMI S2-93A

Engineered for Quality & Performance

• Designed with Japanese Quality Standards and attention to detail and workmanship

• Low Cost of Ownership with best in class material grades

• User Friendly Software Interface customized to unique applications

• Reduced Environmental impact with noise suppression, filtration systems and re-circulation systems

• N2 Purge to Prevent bacteria build up

• ESD Suppression with Ionizer bars at Un-Load

• Automatic Chamber cleaning

• Automatic line purge

Flexible Modular Configurations

• Engineered for throughput, facility requirements

• Full Pre-Assembly Spec Review for customer Engineering and Material changes

• In-line roller conveyor automated systems

• Lower Throughput Applications

• Stand alone systems

• Limited footprint requirements

• Manual Load / Unload

• Bacteria Prevention systems to stop water born contaminants

Outstanding Process Control

Based on our experience with complex Wet Process equipment, Toho Technology Wet Process Solutions meet stringent specifications designed for the Flat Panel Display industry but allow for modular customization to fit all applications. While each machine is engineered at the component level to meet individual customer requirements, Toho systems offer outstanding reliability and flexible process control. User Programmable features ensure consistent processing and monitoring while a wide variety of adjustable parameters allow for optimum utilization of Fab assets.

Full Range Spec Capabilities

• Substrate sizes up to G10

• HF or Mixed Etchants

• Heated Etchant ramp from 40c to 80c in 30 minutes

• Substrate thickness capabilities from 0.7mm +

Process Monitor Control

• Panel & Cassette ID Reading / Correlated to Recipe Settings

• TACT time per Process module, Etch, Rinse, Dry ,etc

• Panel movement and presence

• Direction, Speed, Pressure, Chemical Concentration for all Wet modules

• Etchant Mix, Dispense and Recycle

• Data logging, Error Logging

• Resistivity, Ph

• Temperature Monitors in plumbing, tanks and etch chambers to insure consistency

Process Monitor Control

• Panel & Cassette ID Reading / Correlated to Recipe Settings

• TACT time per Process module, Clean Rinse, Dry ,etc

• Panel movement and presence

• Direction, Speed, Pressure of Brush and Wet modules

• Motor adjustment of upper brush rollers by PLC-operating system

• Surfactant Mix, Dispense and Recycle

• Water Pressure

• Data logging, Error Logging

• Resistivity, Ph

• Water Temperature

(1)Sample data based on prior application, 500mm x 500mm, 0.5mm thick glass substrates in a class 10 clean room on pre-deposition thin film application.

Options and Accessories

3D Analysis Software Upgrade

Callibration Mirror Standards

Wafer Stress Pair Calibration Standards

Gas Panel

Vibration Table / Accessories

Extended Warranty


Low-Temperature Module

Odd-size Rings and Adapters

Want More Information?

Andy Slater
Head of Sales

With over 20 years of experience with Toho Technology, Andy is your go-to person for all product questions.

Email Andy

Phil Slater
Service Manager

Need to troubleshoot or schedule a service call? Phil and the Toho technicians are ready to help.

Ask Phil