The TohoSpec 3100 is a low cost film thickness measurement system that utilizes a modern small spot spectroscopic reflectometer built on a simple-to-use tabletop platform. Incorporating core technology acquired from market leader Nanometrics, this system is specifically designed for a wide variety of R&D applications. The reliable solid state linear diode array provides fast, precise measurements of single-layer films such as oxide, nitride and photo-resist, as well as the top layer on film stacks of up to 3 layers in the thickness range of 100Å to 30µm. An outstanding value, complete with up to 15 standard film thickness measurement algorithms, this rugged and accurate system is used in laboratories worldwide to provide precision film thickness measurements in a compact design.
TohoSpec 3100 is designed to provide accurate film thickness measurements within a vast array of applications.
Guaranteed 3 layer measurement and in some cases beyond 3 depending on parameters. Measures most smooth or semi-smooth surfaces with some reflectance
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Film Stack / Number of Films |
Up to 3 layers |
|
Wavelength Range |
380 -800 nm (standard) 380 -850 nm (Thick film) |
|
Repeatability |
2 Å |
|
Film Type / n & k values |
Obtained |
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Measurement Time |
0.1 to 25 seconds/site (3100) |
|
Data Management |
Statistical data analysis, Data export (ASCII) |
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Wafer Sizes |
Stage handles 3, 4, 5, 6, 8 inch wafers |
|
Head Unit |
Reflectometer Linear Array |
|
|
Halogen |
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Standard Configuration (5x) |
100 Å – 30 µm |
|
Thick Film Configuration (5x) |
100 Å – 70 µm |
1 Film thickness range assumes oxide on silicon. Ranges for other films may vary.
|
Yellow cutoff filter |
480 nm (measured at 50% light transmission) |
|
Orange cutoff filter |
560 nm (measured at 50% light transmission) |
|
5x (standard) |
50 µm (15 µm for Thick film) |
|
10 x (optional) |
25 µm (7.5 µm for Thick film) |
|
50x (optional) |
5 µm (1.5 µm for Thick film) |
|
100 x (optional for Thick film) |
(0.75 µm for Thick film) |
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Dimensions |
753 H x 280 W x 472 D (mm) |
|
System Weight |
22kg / 50 lbs |
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Electrical |
AC100V, 5 A |
