P/N type testing
- Silicon substrates
- Epi Layers
- SOI
- Ion Implant dose & Uniformity
- Poly resistivity & thickness
- Metal deposition monitor
- Silicide process monitor
- Ion Implant diffusion
- Poly gate process monitor
- ITO
- Metals
- Poly-Si, a-Si
4 Point Probe
Industry Standard Sheet Resistivity
Four point probe systems for sheet resistivity measurements on a large variety of materials including group-IV semiconductors, metals, and compound semiconductors, as well as new materials found in flat panel displays and hard disks. The Four Dimensions Four-Point Probe uses two current-supplying and two voltage-sensing probes to provide highly accurate and reproducible sheet resistivity and thickness measurements on a wide variety of materials. The system features user-friendly “one-touch” operation and auto-calibration. Capable of measuring 50 sites in 90 seconds, measurements range from 1mΩ/sq to 800kΩ/sq and extend up to 8E11Ω/sq.
Applications
Specifications
Specifications
- Wafer Sizes Accommodated: 50, 75, 100, 125, 200 mm
- Test Diameter: Up to 3mm from wafer edge
- Measurement Range: 1mΩ/sq. to 800kΩ/sq. or 8E9 Ω/sq.
- Measurement Units: Ω/sq., Ω-cm, V/I, μ [T], Å[T]
- Measurement Repeatability: <0.2% (typical)
- Quick-Checks: 1, 5, 9 sites | 5, 6, 9, 10, 13 site ASTM/SEMI | X-patterns or custom sites
- Cartesian Maps: Any site-interval ≥0.1 mm, up to 6000 sites
- Electronic Accuracy: <0.1% (precision resistor)
- Current Resolution: 16 Bit A/D
- Compliance Voltage for Measurement: 125V