FP Series

Contact Profiler Exceptional sensitivity

Contact Profiler

Toho custom profilers offer comprehensive measurement capabilities for mass production and research facilities that demand accuracy, performance and value.

Incorporating KLA-Tencor’s proprietary low-force measurement head, Toho Profilers provide low stylus force and achieve highly accurate micron to nanometer range measurements to analyze surface flatness, surface roughness, waviness, peak to valley, curvature, texture, stress, and feature dimensions on any square FPD substrate larger than 300mm.

Spec Sheets • FP Series

Industry Leading Repeatability

Toho Profilers provide industry leading measurement repeatability and features configured to your specific application and price range. Enhancing tool value and Material Characterization performance Toho also provides various options to the standard platform.

Substrate Accommodation

Toho Profilers fit all applications with smaller substrate systems featuring an X, Y, axis moving stage and larger systems utilizing gantry positioned heads

KLA-Tencor Micro Head

With outstanding patented measurement technology, best in class profilometry is achieved with exceptional stylus sensitivity

Stylus Profiling

The standard L-Stylus (2µm, 60°) allows for precision scanning with force ranges from 0.5mg to 15mg providing up to 90mm continuous scan length at 25mm per second. Stage area

Theory: Scanning Mechanism

To precisely scan features on various substrates on the A-type models, the Toho FP series utilize a specialized scanning system which primarily consists of an X-drive assembly and an optical flat. The X-drive is equipped with two motors, (slow / fast) that allow for more efficient scanning. The optical flat allows for the stylus to trace a pattern on a wide variety of samples in a straight line.

Theory: Measurement

The Patented Micro Head uses an “L-Stylus” that achieves a pattern trace with precise appropriate force. Depending on the material of the pattern being measured, this force is carefully controlled to prevent damage to the sample and the stylus. The sensor in the head detects the subtle movement of the stylus and the data captured in the Micro Head is then sent to the computer for manipulation.

Accurate Profile Measurements

Toho Profilers are designed to provide accurate profile measurements within applications geared toward FPD large surface area substrates.

• Thin film heights

• Thick film heights

• Photo resist / soft films

• Characterization of surface roughness or waviness

• Surface Curvature and form

• 2D stress on thin films

• Peak to Valley Dimension analysis

• 3D imaging

• Flatness

• Defect Analysis

Options and Accessories

  • CIM System
  • Off-line software
  • Auto Pattern Recognition
  • 3D imaging
  • Stress Measurement
  • Resistivity 4-Point Probe
  • UPS unit
  • VLSI Standard
  • Spare L-Stylus

Specifications

Performance

(G4 or smaller sample size)

Stylus Force Resolution

0.05 mg

Scan Repeatability

10Å (at stage center)

X and Y Repeatabilitiy

± 2 µm

Pattern Recognition

Manual (Auto / option)

Magnification Lens

185 x 0 – 360 degree

Noise Isolator

Equipped (Passive or Active)

Scan Length

Max 30 mm

Scan Speed

1µm / sec ~ 25mm / sec

Sampling Rate

50 / 100 / 200 / sec

Throat Height

15 mm

Vertical Range

0 – 130 µm

L – Stylus

2 µm / 60 degrees

Stylus Force

0.5 mg – 15 mg

(G4.5 or larger sample size)

Stylus Force Resolution

0.05 mg

Scan Repeatability

15Å (at any location)

X and Y Repeatabilitiy

± 2 µm

Pattern Recognition

Auto

Magnification Lens

185 x  0 – 90 / -90 degrees

Noise Isolator

Equipped (Passive or Active)

Scan Length

Max 30 mm1

Scan Speed

1µm / sec ~ 25mm / sec

Sampling Rate

50 / 100 / 200 / sec

Throat Height

15 mm

Vertical Range

0 – 130 µm

L – Stylus

2 µm / 60 degrees

Stylus Force

0.5 mg – 15 mg

1 30mm available only when Stress option is included. With no stress option, scan length is 10mm.

Hardware Configuration

(G4 or smaller sample size)

Sample Size (mm)

300mm to 880mm

X, Y movement

Moving Stage (X, Y)  Lead screw + DC servo motor

Z movement

Slide block + LM guide

THETA movement

Wheel & Wormgear + DC servo motor

(G4.5 or larger sample size)

Sample Size (mm)

920mm  to 3080mm

X, Y movement

Moving Stage (X) & Moving Head (Y)  Scale + AC servo motor

Z movement

Slide block + LM guide + Million guide

THETA movement

Built-in motor guide + AC servo motor

Facilities Requirements2

(G4 or smaller sample size)

Dimensions

1300 x 1300mm

Weight

800kg

Electrical

1φ100V-200V±10%

CDA

15L/min

Vacuum

15L/min

Floor condition

VC-D

2 dependant on sample size

(G4.5 or larger sample size)

Dimensions

2300 x 2400mm

Weight

5500kg

Electrical

3φ200V±10%

CDA

250L/min

Vacuum

30L/min

Floor condition

VC-C

2 dependant on sample size

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