Resistivity and Sheet Resistance by Napson
Contact and non-contact solutions from the R&D lab to high-volume production
Toho Technology is the official North American distributor of Napson resistivity and sheet resistance systems. Napson’s line includes manual, semi-automatic and fully automatic systems for measuring sheet resistance, resistivity and wafer thickness. They work on silicon and compound semiconductor wafers, solar materials, conductive thin films such as ITO and metal layers, and emerging materials including graphene, carbon nanotubes and silver nanowire.
Contact Type ↓Non-Contact Type ↓Specialty & Handheld ↓Contact Type
Two outer probes source current and two inner probes sense voltage, eliminating contact resistance for accurate sheet resistance and resistivity across a very wide range.
MANUAL
RT-70V Series
Manual 4-point probe tester with JOG-dial thickness input and auto range change-over. 5 mΩ/sq – 10 MΩ/sq.
SEMI-AUTOMATIC
Cresbox
Small-footprint mapping with thickness, edge and temperature correction for silicon. Up to 8 in.
RT-3000 / RG-2000
Wide-range mapping with S and H testers, up to 1 GΩ/sq. Up to 8 in; 12 in with the RG-3000 stage.
FULLY AUTOMATIC
WS-8800
Cassette-to-cassette 4-point probe system for production wafer evaluation.
RG-2000AL
Automatic 4-point probe mapping for large substrates and flat-panel glass, with 2-D/3-D mapping.
Non-Contact Type
Sheet resistance and resistivity are measured without touching the sample, protecting sensitive films, production wafers and large glass panels.
MANUAL
EC-80
Compact eddy-current tester that measures when a wafer is inserted. 10 mΩ/sq – 3,000 Ω/sq; up to 8 in.
PVE-80
Compact manual non-contact sheet resistance and resistivity measurement.
SEMI-AUTOMATIC
NC-80MAP
Multi-point mapping with up to four probes, down to 7 mm from the edge. 2–8 in (12 in option).
CRN-100
Semi-automatic non-contact resistivity measurement.
FULLY AUTOMATIC
NC-6800
Wafer sorter measuring resistivity, thickness and P/N type without contact. 3–8 in.
NC-600MAP
Automatic non-contact measurement of ITO and metal films on flat-panel glass; robot-loading ready.
Specialty and Handheld Tools
Handheld instruments for checks anywhere on the floor, plus dedicated tools for lifetime, conductivity type and TCR measurement.
DUORES
Handheld meter with interchangeable eddy-current and 4-point probe heads for samples of any size.
EC-80P
Handheld eddy-current probe with wafer, bulk resistivity and sheet resistance modes.
HF-90R / HF-100DCA
Carrier lifetime measurement for silicon wafer and material quality evaluation.
PN Checker
Fast conductivity-type (P/N) identification for wafers and materials.
SRS-2010
Temperature coefficient of resistance and spreading resistance measurement.
Not sure which system fits your application?
Our applications team can help you choose the right configuration for your materials, sample size and throughput.
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