FPM Series Zygo 3D Large Area Optical Profilometry
Toho Technology proudly offers the FPM Series of 3-D Optical Profilers built exclusively with technology and measurement heads acquired from Zygo Corporation. Toho’s Zygo-FPM Optical Profilers are non-contact metrology systems designed for large area R&D analysis and production applications to provide a wide range of capabilities and value.
Toho-Zygo FPM multi-head system
Overview
White Light Interferometer Systems
Toho Optical Profilers are white light interferometer systems, offering fast, non-contact, high-precision 3-D metrology of surface features. Toho systems include the proprietary MetroPro® Software. Choosing the right surface measurement system depends on your application’s requirements, including precision, speed, automation, configuration flexibility, and vertical range.
Using ZYGO’s patented scanning white light interferometry (SWLI) technology, the FPM series 3-D optical surface profilers easily measure a wide range of surfaces, including smooth, rough, flat, sloped, and stepped surfaces.
Although the FPM is a series specifically designed to inspect cellular flat panels or large displays requiring high-res analyses, MEMS, Micro-Electronics, and Display manufacturers worldwide rely on the Toho FPM Series for superior 3-D feature analysis.
Standard features
Comprehensive, Fast, and Flexible
Comprehensive Measurements
FPM systems and their measurement data are used to improve production yield especially in Color Filter, TFT process lines and ODF (One Drop Fill) processes. Height and width, area data of Photo Spacer and VA structure, Black Matrix, and Color Filter can be measured at one time with our proprietary OneShot™ system. SureShot™ provides Halftone process feature measurement such as film thickness and Critical Dimensions. DropShot™ also provides droplet volume and shapes.
Dynamic Software
The advanced software platform provides the process engineers with enhanced high-speed data retrieval/analysis, using the latest digital imaging technology. Includes world renowned Zygo MetroPro 3-D analysis software suite.
Flexibility/Speed
Toho FPM systems reduce critical TACT time by allowing the operator to adjust sensor head utilization on multi-head tools. 2 seconds for complete 3-D/CD measurement of bare and film covered samples.
Applications
Accurate Measurements Across a Vast Array of Applications
Color Filter and Display
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Color Filter Pixel Volume on ODF process
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Surface form and thickness of RGB filters
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Main PS and Sub PS on Touch Screen
TFT and Lithography
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ITO CD Overlay for mask alignment
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3-D/CD inspection for Half-tone Exposure
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Photo-Resist film thickness
Ink Jet Printing
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Volume, Form, Height of pixel for Ink Jet print control
Technology
Key Technologies and Metrology
Key Technologies
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High-speed SWLI
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Surface profiling of transparent films
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Custom 20x or 50x FPM objective
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Large stage mecha-tronics
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High-speed motion with nanometer stability and micron absolute positioning
Vertical Metrology
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Measurement precision on large FPM stages
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Repro ≤ 20-30 nm, App. dependant, (3σ @20x) standard
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SuperOneShot for sub 20nm applications
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Film thickness measured / films 1 to 50 μm, standard
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TFT HalfTone (HT) options to below 400nm
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Film surface topography measured for films ≥ 400nm
Lateral Metrology
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IntelliVision™ Pattern recognition & feature finding
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Lateral CD precision to 1 / 20th pixel
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Repro ≤ 0.2 μm (3σ with 20x objective; full pixel coverage)
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Repro ≤ 0.05 μm (3σ with 50x objective)
Specifications
FPM Series Performance
The Toho FPM Series incorporates original Zygo Measurement Heads and design. Specifications subject to change.
Configure an FPM System for Your Line
Tell us your panel size, features to measure, and throughput. We will recommend the head count and objectives.