FP Series Contact Profilers
Toho custom profilers offer comprehensive measurement capabilities for mass production and research facilities that demand accuracy, performance and value. Incorporating KLA’s proprietary low-force measurement head, Toho Profilers provide low stylus force and achieve highly accurate micron to nanometer range measurements.
FP Series contact profiler
Models
Substrate Accommodation
Toho offers a full range of FP-Series Profilers built to accommodate substrates of all sizes. FP-10 models are ideal for smaller panels.
FP-10
A-Type: Head Stationary / Stage Moves
For smaller scale applications where footprint and budgets are limited, the Toho FP-10 is the right choice for surface analysis. The original KLA design with a moveable stage is utilized. Two lead screws (X and Y) are used for location of a measurement point while the patented Micro Head & stylus is fixed over the stage. Accommodating various materials, shapes and rigidities, the FP-10 offers excellent versatility.
FP-20
X-Type: Head Moves / Stage is Stationary
With larger glass panels, noise can be generated with sample handling. The X-type FP series resolves this issue with a moveable Micro Head. The granite measurement stage features an X axis and a gantry suspends the scanner with the Micro Head moving in the Y axis. This structure allows for faster measurements with more reliable data at all points on a large area. FP-20’s are used at all major display fabs worldwide.
Standard features
Highly Repeatable Step Height Measurements at 10Å
Toho Profilers analyze surface flatness, surface roughness, waviness, peak to valley, curvature, texture, stress, and feature dimensions specifically for large square substrate larger than 300mm.
KLA-Tencor Micro Head
Toho Profilers feature patented KLA-Tencor measurement head core technology in order to provide best in class profilometry.
Stylus Profiling
The standard L-Stylus (2μm, 60°) allows for precision scanning with force ranges from 0.5mg to 15mg providing up to 90mm continuous scan length at 25mm per second.
Repeatability
Excellent and reliable measurement reproduction featuring scan repeatability of 10 Å at center stage.
Applications
Accurate Profile Measurements Across a Vast Array of Applications
Film Heights
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Thin film heights
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Thick film heights
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Photo resist / soft films
Surface Form
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Surface Roughness Characterization
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Surface Curvature and form
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Flatness
Analysis
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Peak to Valley Dimension analysis
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3D imaging
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Defect Analysis
Specifications
FP Series Specifications
Performance
Configuration
Options
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CIM Control System
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Off-line software
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Auto Pattern Recognition
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3D Imaging
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Resistivity 4-Point Probe
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UPS Unit
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VLSI Standard
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Spare L-Stylus
The Toho FP Series incorporates original KLA Measurement Heads and design. Specifications subject to change.
Related systems
Related Systems
Find the Right FP Profiler for Your Substrates
Tell us your substrate size and what you need to measure. We will recommend the A-Type or X-Type configuration and options.