Typical Applications include:
- Measures epitaxial thickness by non-destructive FT-IR technique with very high wafer throughput
- Determines epitaxial thickness on bulk, on patterned wafers, on top of the buried layers, SiGe, polysilicon and multi layers
- FILM Z: Unique algorithms deliver instant qualification of SOI, SiC, and other epitaxial films.
- Built-in intelligence extends the applicability to almost every film material imaginable.
- Qualify thickness of recycled test wafers for rapid payback