RPM Blue

Photoluminescence (PL) Mapping

The RPMBlue is the industry standard high-volume, production oriented photoluminescence mapping system. By tuning the system capabilities to your control and measurement needs for the production line, the system becomes fast and economical. It can be fitted with up to two internal and one external excitation lasers, which are typically selected according to the bandgap of your material. Three different gratings are available to match the PL wavelength and thickness fringe range. It accommodates 2” to 6” diameter wafers standard. Certain 8” wafers can be loaded as well. Robotic loading from up to 3 cassette stations is a standard option.

Applications

Typical applications are peak and dominant wavelength, FWHM, PL intensity, film thickness, and surface roughness monitoring of LED, Laser, high power / high frequency device epi-structures, and many other applications based on compound semiconductors.

The RPMblue/FS is designed to provide fast, accurate, precise and reliable PL metrology across the entire wavelength range. This includes from high-Al content AlGaN alloys for GaN FET’s and UV lasers/LED’s to communication laser applications in the NIR and everything in between. To ensure the highest possible wavelength accuracy, the RPMblue/FS contains its own built-in spectral source for monochromator calibration.

Features

  • Wafer Sizes ≤ 200mm and sample pieces
  • up to 80 wph @ 2 mm spatial resolution on 2” wafers
  • Optional fully automated wafer handling with up to 3 cassette station
  • Fast R-T stage for mapping or measurement at individual coordinates
  • research grade 300mm focal length spectrometer
  • large numerical aperture optics, for high photon collection efficiency and low intensity detection capability
  • Up to 4 lasers (2 internal, 1 diode laser and 1 external) ranging from 213 nm – 1064 nm excitation wavelength
  • Up to 3 gratings for high resolution spectral PL mapping
  • Up to 2 detectors covering 200 nm to 2.6 μm
  • Integrated white light source for thickness and reflectance measurements
  • high speed non spectral mapping mode @ 2000 pps
  • high speed spectral mapping mode @ 200 pps

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