- Lenses (single & trays)
- Diamond-turned parts & molds
- MEMS
- Semiconductor
- Advanced Packaging
- 3D Printed Products
- Micro-fluidic cells
- LED & OLED
- Transparent films
QuickPRO-3D
Non-Contact 3D Surface Profiler
The QuickPRO-3D is a compact (Bench-Top) non-contact metrology system designed from the ground-up for a high-accuracy at high-speed for most demanding measurements of surface topography and film thickness. The core measurement technology is based on high-bandwidth chromatic confocal white light sensing with motion provided by high-force linear motors and nanometer precision optical encoders. A solid granite platform with integrated temperature sensing provides the requisite structural and thermal stability needed to achieve the guaranteed 150 nm Z-axis measurement accuracy and sub-micron X/Y-axis positional accuracy.
QuickPRO-3D
Applications
System Characteristics
- Compact, bench-top unit with environmental enclosure
- Non-contact chromatic confocal sensor (Point or Line Scan)
- 3D surface topography and transparent film thickness
- Integrated CMOS camera with co-axial or ring illumination
- Nanometer encoded X/Y/Z motion with magnetic linear motors and cross roller bearings
- Available vacuum chucks for sample/tray holding
- User friendly CalcuSurf3D™ Recipe Generation, Data Acquisition, and Surface Analysis software permits optimized measurement sampling density for best coverage at highest throughput
- Extensive 3D Surface plotting and data reporting functions conforming to DIN ISO
