Non-Contact 3D Surface Profiler

The QuickPRO-3D is a compact (Bench-Top) non-contact metrology system designed from the ground-up for a high-accuracy at high-speed for most demanding measurements of surface topography and film thickness. The core measurement technology is based on high-bandwidth chromatic confocal white light sensing with motion provided by high-force linear motors and nanometer precision optical encoders. A solid granite platform with integrated temperature sensing provides the requisite structural and thermal stability needed to achieve the guaranteed 150 nm Z-axis measurement accuracy and sub-micron X/Y-axis positional accuracy.



  • Lenses (single & trays)
  • Diamond-turned parts & molds
  • MEMS
  • Semiconductor
  • Advanced Packaging
  • 3D Printed Products
  • Micro-fluidic cells
  • LED & OLED
  • Transparent films

System Characteristics

  • Compact, bench-top unit with environmental enclosure
  • Non-contact chromatic confocal sensor (Point or Line Scan)
  • 3D surface topography and transparent film thickness
  • Integrated CMOS camera with co-axial or ring illumination
  • Nanometer encoded X/Y/Z motion with magnetic linear motors and cross roller bearings
  • Available vacuum chucks for sample/tray holding
  • User friendly CalcuSurf3D™ Recipe Generation, Data Acquisition, and Surface Analysis software permits optimized measurement sampling density for best coverage at highest throughput
  • Extensive 3D Surface plotting and data reporting functions conforming to DIN ISO


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