The NanoSpec 6500 utilizes an advanced spectroscopic reflectometer to measure optically transparent films that are used in the manufacture of thin film on glass for displays and other applications. Designed for maximum throughput, reliability and accuracy, the NanoSpec measures all transparent or translucent multi-stack films on virtually any kind of substrate. Capable of handling all sizes from “tablet” size glass to G10 panels almost three (3) meters square, the 6500 is specifically designed for a wide variety of production applications. The rugged system provides precise measurements of single-layer films such as oxide, nitride and photo-resist, as well as the top layer on film stacks of up to 3 layers in the thickness range of 100Å to 35µm and features an optional 0.75µm spot for small areas. Proprietary software enables Multilayer Film Analysis with the ability to select film constants, scan ranges and substrate types.
With value added options like Contact Angle, Resistivity Heads, Pattern Recognition and XMP software, the TohoSpec 6500 provides multiple critical measurements on a single platform. Common Applications served by the TohoSpec 6500 include the following;
|
Film Stack / Number of Films |
Up to 3 layers |
|
Wavelength Range |
400 -800 nm |
|
Optional Transmittance Measurement |
400 -800 nm |
|
Film Thickness Range1 |
|
|
Standard Configuration (10x) |
100 Å – 30 µm |
|
Range: single stack |
10 nm ~ 35 µm1 |
|
Repeatability |
1.0% or 2 Å 2 |
|
Film Type / n & k values |
obtained |
|
Measurement Time |
0.5 seconds per point (film dependant) |
|
Data Management |
Statistical data analysis, Data export (ASCII) |
1 value obtained from SiO2/Si
2 1 sigma based on measuring same site 15 times with 10X w/out autofocus after autofocus on first measurement.
standard sample with interferance amplitude reflectance is greater than 5% of absolute reflectance
|
Panel Sizes |
300 ~ 3200 mm |
|
Head Unit |
Interferometer / Reflectometer Linear Array |
|
5x (standard) |
50 µm |
|
10 x (standard) |
25 µm |
|
50x (standard) |
5 µm |
|
100 x (optional for Thick film) |
0.75 µm |
|
Optical Filters (Manual Cutoff Filters) |
|
|
Yellow cutoff filter |
480 nm (measured at 50% light transmission) |
|
Orange cutoff filter |
560 nm (measured at 50% light transmission) |
|
Light Source |
Halogen |
|
Dimensions |
1700mm x 1700mm x 1830 |
|
Weight |
2200 Kg |
|
Electrical |
Single Phase AC 200V 50/60Hz, 10A – AC 230V, 50/60 Hz, 2.5 A |
|
Vacuum |
-55 to 80 KPa |
