FPM Series Optical Profiler

As part of our effort to provide state of the art Metrology Solutions, Toho Technology proudly offers the Zygo FPM Series of 3D Optical Profilers. Since acquiring this product line from Zygo Corporation in 2009, MEMS and Display manufacturers have come to Toho for superior 3D feature analysis systems. Toho’s Zygo-FPM tools are non-contact metrology systems designed for flat panel display production applications but have a wide range of capabilities and value.

Toho Optical profilers are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features. Toho systems include the proprietary MetroPro® Software. Choosing the right surface measurement system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range. The FPM is a series specifically designed to inspect cellular flat panels or large displays requiring high-res analyses. Using ZYGO's patented scanning white light interferometry (SWLI) technology, the FPM series 3D optical surface profilers easily measure a wide range of surfaces, including smooth, rough, flat, sloped, and stepped surfaces.

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(773) 583-7183
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Spec Sheet

Assuring world-class performance and accuracy, Toho’s FPM series is equipped with the FPD Dedicated IntelliSensor™ head, which is developed and provided by Zygo Corporation, the respected global market leader in optical metrology systems.

• Patented top surface metrology (Frequency Domain Analysis)

• Superior thin-film metrology (Patented Advanced Films Analysis)

• At least 3x higher-speed data acquisition (1.3 Mpixels @ 500 Hz)

• Industry best stage positioning & stability (ACS motion control)

• Custom designed objective optics & coatings (3x increase in contrast)

• Custom designed illumination optics (2x increase in brightness)

• Superior Vision software based on powerful COGNEX VisionPro suite

• World renowned Zygo MetroPro 3D analysis software suite

Standard Features

Comprehensive Measurements

FPM systems and their measurement data are used to improve production yield especially in, Color Filter, TFT process lines and ODF (One Drop Fill) processes. Height and width, area data of Photo Spacer and VA structure, Black Matrix, and Color Filter can be measured at one time with our proprietary OneShotTM system. SureShotTM provides Halftone process feature measurement such as film thickness and Critical Dimensions. DropShot TM also provides droplets volume and shape.

Dynamic Software

The advanced software platform provides the process engineer with Enhanced high-speed data retrieval/analysis, using the latest digital imaging technology.

Flexibility / Speed

Toho FPM systems reduce critical TACT time by allowing the operator to adjust sensor head utilization on multi-head tools. 2 second for complete 3D-CD measurement of bare and film covered samples. Other options 3.5 and 5 seconds.

Production throughput ready - >40K glass/month. Line ready Automation – Integrated with customer or Toho supplied conveyor or roller.

Options & Accessories

• Optional 20x objective

• Optional 100x objective

• DVD-RW drive

• Cleanroom operations manual (hard copy)

• VLSI Standard film thickness standard wafer (6- or 8-inch)1

Toho has installed and serviced Zygo FPM systems in Europe, North America and Asia and boasts a worldwide installed base of hundreds of systems. Engineered to provide outstanding superior measurement capability with low cost of ownership, Toho FPM tools are widely respected as the leader among similar systems. Leading specifications and performance place the Toho FPM Series tools at the top of their class. Specifications are listed below.

Zygo FPM Series 3D Optical Profiler Specification                           Flat Panel  
     
Measurement Performance    
 TACT Time  2.5 to 5 sec FAAM; average 17 sec Glass Prep  
Uptime ≥ 95%  
Throughput  40K glass/month (4-heads)  
Height Repro  ≤ 20-30 nm (3-σ)  
Lateral CD/OL Repro  ≤ .2 micron (3-σ @ 20x)  
Head-to-Head Correlation ≤ 20-30 nm (3-σ)  
     
Key Technologies High-speed SWLI  
  Surface profiling of transparent films  
  Custom 20x  or 50x FPM objective  
  Large stage mecha-tronics   
  Micron Absolute postitioning  
  High-speed motion with nanometer stability
and micron absolute positioning
 
     
 Vertical Metrology Measurement precision on large FPM stages  
    Repro ≤ 20-30 nm,  App.  dependant, (3σ @20x) standard  
    SuperOneShot for sub 20nm applications  
    Film thickness measured / films 1 to 50 µm, standard  
   TFT HalfTone (HT) options to below 400nm  
  Film surface topography measured for films ≥ 400nm  
     
Lateral Metrology IntelliVisionTM  Pattern recognition & feature finding  
  Lateral CD precision to 1 / 20th pixel  
   Repro ≤ 0.2 µm (3σ with 20x objective; full pixel coverage)  
   Repro ≤ 0.05 µm (3σ with 50x objective)  
     
     
     
     
     
     

Theory: White Light Interferometry

Interferometry makes use of the wave superposition principle to combine waves in a way that will cause the result of their combination to extract information from those instantaneous wave fronts. This works because when two waves combine, the resulting pattern is determined by the phase difference between the two waves—waves that are in phase will undergo constructive interference while waves that are out of phase will undergo destructive interference. While white light interferometry is not new, combining old interferometry techniques with modern electronics, computers, and software has produced the extremely powerful FPM Measurement Tools.

Currently, most interferometry is performed using a laser as the light source. The primary reason for this is that the long coherence length of laser light makes it easy to obtain interference fringes and interferometer path lengths no longer have to be matched as they do if a short coherence length white light source is used. For an interferometer to be a true white light achromatic interferometer two conditions need to be satisfied.

• First, the position of the zero order interference fringe must be independent of wavelength.

• Second, the spacing of the interference fringes must be independent of wavelength.

That is, the position of all interference fringes, independent of order number, is independent of wavelength.

Toho FPM Series tools are designed to provide accurate measurements within a vast array of applications.

FPM systems and their measurement data are used to improve production yield especially in, Color Filter, TFT process lines and ODF (One Drop Fill) processes. Height and width, area data of Photo Spacer and VA structure, Black Matrix, and Color Filter can be measured at one time with our proprietary OneShotTM system. SureShotTM provides Halftone process feature measurement such as film thickness and Critical Dimensions. DropShot TM also provides droplets volume and shape.

Zygo FPM 3D Optical Profiler    Applications & Processes
     
Fab                             Application Description Relevant Process
     
Cell                                                         One Shot Pixel Volume (CF) ODF (VA / IPS)
One Shot Touch Panel Main PS and sub-PS Touch Screen ODF with sub-PS
Super One Shot Pixel Volume (TFT) ODF (IPS)
One Shot CDRV PS Height & Area PS Manufacture
  MVA Height & Width MVA Manufacture
  ITO CD Overlay Mask Alignment
     
TFT Array                                    Sure Shot HT 3-D CD Inspection Half-Tone Exposure Control
Sure Shot CDRV Height/Lateral Geometry TFT Lithography Control 
  Overlay  
  PR Film Thickness  
  Depth and Width of Half-Tone  
     
     
Color Filter                                  One Shot CDRV CDRV – RGB CD/OL CF Lithography Control
One Shot Surface form and thickness of RGB filters RGB Filter Manufacture
     
     
Color Filter / Ink Jet Printer             Drop Shot Volume , Form, Height of pixel Ink Jet Printer Control