At Toho, we take pride in the craftsmanship of our equipment and in the relationships we have with our customers. We recognize that our customers expect
capital equipment to function reliably in the long term with a minimum of maintenance needs.
For this reason we are committed to supporting our customers and their equipment for the entire lifespan. Customers can expect to receive the same level of
attention, support, and expediency in handling service requests after the warranty ends as they did during the sales process and warranty period.
Toho Technology is committed to comprehensive technical support, including full installation services. Our trained field service professionals personally
install every Toho system. Installations range from the simple one-day installation of a bench-top metrology tool to the complex month-long process of
integrating a wet process system into an automated factory environment.
Our Technical Support capabilities include:
Spare parts sourcing
Remote access troubleshooting
On-site repair and service
Toho customers all over the world are covered by two types of service depending on their location.
• Americas, Japan, China, and Indonesia:
Direct coverage by Toho Technology service technicians
Certified expert coverage through one of our distributor service professionals. All of our distributors are fully trained to
conduct equipment installations, training, and repairs to Toho standards.
Our experience has proven that capital equipment maintained annually requires fewer service requests for repairs, parts, and maintenance.
Preventative maintenance procedures and schedules are covered in the training and installation of all Toho equipment. Regular maintenance performed by Toho
service technicians minimizes problems and maximizes Mean Time Between Failure, ensuring a lifetime of reliable and productive use. Toho offers on-call
service as well as extended warranty contracts tailored to the specific needs of each customer’s operation.
A typical PM Visit for a bench-top metrology system includes:
Verify integrity of customer-owned standards
Perform certified standard calibration tests
Check all power supply voltage levels
Verify integrity of all connections, cables and board interface
Verify optical / light source alignment and output
Check integrity of all safety interlocks
Defrag hard disk
Clean all moving components
Lubricate all moving components
Other customer needs and issues as applicable
Contact Toho Technology to learn more about recommended Preventative Maintenance schedules and procedures and to request a quotation.
Sourcing and verifying the specifications of spare parts for large capital equipment can be a time consuming and costly task. This task becomes even more
complex when issues of part obsolescence, model change, and international specification variations come into play.
Our skilled procurement staff will do the work of sourcing parts and verifying form, fit, and function to minimize errors and maximize efficiency.
Bench-Top Metrology Systems
Consumable parts that need replacement over time, such as lasers and quartz plates, are kept in stock at our Chicago office. Other parts and equipment are
kept in stock at our manufacturing facilities in Japan and China.
Stand-Alone Process Equipment
Parts for stand-alone process equipment fall into three categories:
Spares for consumable parts: O-rings, filters, replacement brushes
Minor spares: Gauges, valves
Major spares: Pumps, motors
Toho is committed to providing comprehensive spare parts sourcing services, including expediting. We utilize a
network of vendors in the US, Europe, China, Korea, and Japan to source difficult-to-find parts and unique fixtures.
With our Japanese- and Chinese-speaking staff, custom material procurement services are also available.
Contact Toho Technology to learn more about recommended spare parts and request a quotation.
Toho Technology product training ensures that our customers will:
understand the full capabilities of their equipment,
confidently operate the systems and,
analyze the data derived from the software.
A comprehensive hands-on training is included in the installation of all Toho equipment. User manuals and step-by-step training program outlines are
provided in advance so that users can become familiar with the equipment’s functions before the training begins. When necessary, bilingual language support
staff are available to assist with trainings.
We recognize that the first group trained to use a Toho tool may not be the same group that will use it the next year, or five years from now. We are
pleased to offer refresher training on site annually or as needed, so that your staff is always able to operate your Toho equipment at full capacity.
for a sample training program outline (PDF).