Stealth Series Macro Inspection

To meet the constant demand for yield improvement in the Displays market, Toho’s Stealth Series products offer cutting edge Macro-Inspection capabilities specifically designed to find imperfections, defects, residue commonly known as “Mura” effects in the Displays industry. Ideal for capturing and containing costly irregularities in film uniformity and thickness, chemical residue and evaluating crystalline structures, Stealth systems offer global inspection of the substrate able to detect Mura images across an entire glass substrate that often go missed by local inspection techniques. Through a unique and proprietary design, Toho Stealth systems utilize highly sensitive CCD cameras combined with a specialized array of blue LED lights to provide fast scans and accurate detections.

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Toho Stealth Systems Detect global Mura and other defects during various stages of manufacturing providing key benefits to the process engineer.

Greater Defect Detection

• Able to defect film mura and cleaner defects where standard fixed-point film thickness measurement systems cannot

Cost Reduction

• Re-treatable substrates—up until the Pre-etch process—determined unacceptable by macro-inspection can be re-worked to reduce costs

Early Detection & Yield Improvement

• From evaluating results of Mura defects on substrates, users can use this information to adjust Process Parameters to achieve higher yields

Toho Stealth systems are capable of a wide variety of measurements. Specializing in Maco-imaging, as opposed to micro defect inspection, Stealth systems detect large defects that can be difficult to detect over the entire surface area of the substrate.

Measurable Substrates

• Patterned Glass such as Color Filter or TFT

• Non-Patterned / Film on Glass such as Photo-resist, PI, LTPS, ITO, Nitrides, Oxides, etc

Film

• Patterned / OLED

• Non-Patterned / Resist, PI, ITO

Detectable Defects

• Global Mura

• Film thickness non-uniformity

• Mask defocus, stitching defects

• Chemical Residue

• Large Voids (< 100 µm)

Through a unique and proprietary design, Toho Stealth systems utilize highly sensitive CCD cameras combined with a specialized array of blue LED lights to provide fast scans and accurate detections.

Stealth Systems use a highly sensitive line CCD sensor camera designed specifically for Toho to provide stable scanning on large area substrates.

• Built specifically to detect Mura and other Macro defects

• Minimizes random noise while maximizing brightness stability and uniformity for each pixel measured

• 8-bit, 255 brightness camera that stresses image contrast in order to maintain an average brightness of 128

A specialized Array of HB-LED’s has been designed to provide uniform light projection across the entire substrate surface.

• Composed of multiple individual HB-LED

• Better than standard LED’s with varying light intensity

• Custom designed control box dynamically mange LED array stability

Stealth FP

• OLED film irregularities

• Patterned PS and Panel Defects

• Photo-Resist on Glass

• PI film on Glass

• LTPS crystal structure analysis

Stealth FP

Designed for the Flat Panel (FP) industry, this system is ideal for inspecting panels before it is too late to discover thin film irregularities, LTPS conditions, problems with PL processes and other issues.

Panel Sizes Up to G6 glass sizes
Light source LED Array
Sensor High Resolution CCD Sensor
Options 1 min (camera count dependant)
Recipes Customizable
Pass/Fail Automated pass / fail
Traceability Image saving function for traceability
Compliance Class 1000 (higher level available with upgrades)