Precision Stripping

For over 3 decades, Toho Technology has developed, produced and innovated Wet Process systems to meet the ever changing and stringent demands of the Displays and Medical Imaging markets. Precision removal of Photo Resist with dynamic processes and industry standard chemistry from leaders like Parker, Lion, AZ, TOK, Semiclean have has been a core part of Toho’s Wet Process operation. Built specifically for the stringent demands of the FPD industry, Toho Strippers feature dry-in/dry-out process flow with superior Strip results and ultra-clean substrates at the final un-load stage. Fully programmable, in-situ process monitoring allows for comprehensive Strip control for accurate and uniform results. Toho Technology Wet Process Solutions offer outstanding value with additional benefits that make Toho the clear best choice for long term intensive performance.

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(773) 583-7183
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Toho’s worldwide experience boasts an installed base of over 300 Precision Wet Tools for various applications. This allows Plant Managers and Process Engineers alike to benefit from “best in class practices” and cutting edge Wet Process methodologies. The common modular process configurations below are enhanced and customized to meet budget and application needs while taking advantage of second to none quality manufacturing and “kaizen” production methods developed in Japan for the Asian Flat Panel Display industry.

Common Modular Process Configuration

(common sequential flow – items 1 ~ 10)

1. Robot Load / Un-load, Manual Load, Indexed Elevator, Loader Conveyor

2. Cassette / Panel ID Read, Record

3. Conveyance system with lateral guides

4. Buffer to prevent cross contamination

5. Strip Chamber featuring Spray and Immersion processes

6. Cascade Rinse with separate supply of the final cascade module

7. Final DIW Rinse

8. Air Knife high pressure CDA or N2

9. Un-Load

10. Auxiliary Components

  • Control Cabinet
  • Chemical Distribution Unit
  • Chiller

Strip Chamber Features

(Multiple Dynamic Automated Components)

Aqua Knife sprays Strip Agent and DIW to pre condition the panel

Rocking Shower™ Etchant dispersed from high pressure nozzles

  • Nozzle motion in criss-cross or zig-zag pattern,
  • Combination of Swing Nozzle / Panel Oscillation

DIP Tank

  • Full panel Immersion in etchant
  • Programmable temperature control
  • Panel Slope / Panel oscillation for large panels
  • Substrate Swing

Air-cut chemical removal

Quench Rinse

Optional Process Configurations

• HEPA filtration

• Bacteria Prevention systems to stop water born contaminants

• Concentration Monitor

• Ionizers in critical ESD control areas - Unload module

• Safety light curtains at openings

• CIM / Host PC interface

Toho Quality Build

• Modular PP Construction

• Easy access Maintenance openings

• Double glass covers

• Fully enclosed Process Chambers

• Positive air pressure

• Built in exhaust

• Multiple safety interlocks, leak sensors, exhaust sensors, over-heat, dry pump and other built in safety systems

• All piping, labeled for flow directions, pressure, etc.

• All wiring labeled and clearly marked out

Based on our experience with complex Wet Process equipment, Toho Technology Wet Process Solutions meet stringent specifications designed for the Flat Panel Display industry but allow for modular customization to fit all applications. While each machine is engineered at the component level to meet individual customer requirements, Toho systems offer outstanding reliability and flexible process control. User Programmable features ensure consistent processing and monitoring while a wide variety of adjustable parameters allow for optimum utilization of Fab assets.

Full Range Spec Capabilities

• Substrate sizes up to G10

• Experience with Parker, Lion, AZ, TOK, Semiclean strip agents

• Heated Chemical ramp from 40c to 80c in 30 minutes

• Substrate thickness capabilities from 0.7mm +

Process Monitor Control

• Panel & Cassette ID Reading / Correlated to Recipe Settings

• TACT time per Process module, Etch, Rinse, Dry ,etc

• Panel movement and presence

• Direction, Speed, Pressure, Chemical Concentration for all Wet modules

• Strip Agent Mix, Dispense and Recycle

• Data logging, Error Logging

• Resistivity, Ph

• Temperature Monitors in plumbing, tanks and etch chambers to insure consistency

All Toho Wet StripTools are Simple to Operate and feature easy to understand user interface, gauges, and fully labeled components. Toho Technology Wet Process Solutions offer outstanding value with additional benefits that make Toho the clear best choice for long term value and performance. High-performance Stripping equipment with Toho process technology ensures best Strip results. Process Engineers who select Toho Equipment enjoy product enhancements and benefits such as;

Outstanding Customer Support

• Maintenance & Operations Training at Source & Site acceptance

• Training for all Preventative Maintenance & Repair techniques

• Bilingual Assistance as needed

• Trained Service Technicians on-site during and after installations

• Local US Service Technician Presence

• Optional Remote Access software for troubleshooting and programming assistance

• PLC programming support

• Global Compliance

  • NFPA codes and regulations, NEC, OSHA
  • CE Compliance as needed
  • SEMI S2-93A

Engineered for Quality & Performance

• Designed with Japanese Quality Standards and attention to detail and workmanship

• Low Cost of Ownership with best in class material grades

• User Friendly Software Interface customized to unique applications

• Reduced Environmental impact with noise suppression, filtration systems and re-circulation systems

• N2 Purge to Prevent bacteria build up

• ESD Suppression with Ionizer bars at Un-Load

• Automatic Chamber cleaning

• Automatic line purge

Flexible Modular Configurations

• Engineered for throughput, facility requirements

• Full Pre-Assembly Spec Review for customer Engineering and Material changes

• In-line roller conveyor automated systems

• Lower Throughput Applications

• Stand alone systems

• Limited footprint requirements

• Manual Load / Unload

• Bacteria Prevention systems to stop water born contaminants

Toho realizes that while some applications are focused on nanometer precision, others demand robust throughput at economical price points. All Toho Etch tools are customized to meet virtually any footprint, substrate size and thickness. Some examples of common FPD Strip Applications and Chemistry that Toho has experience with are listed below.

WET PROCESS EQUIPMENT Precision Stripping
       
Process Configuration Strip Agent Film Panel Size
Spray Shower TOK 104 Photo Resist 307 x 470 x 1.1
Spray Shower and
Ultrasonic Immersion
Parker Polyimide 1100 x 1300 x 0.7
Spray Shower and
Ultrasonic Immersion
Semiclean Polyimide 1500 x 1850 x 0.5
Spray Shower Hayashi SPX Photo Resist 1100 x 1300 x 0.7
Spray Shower KOH Polyimide 2160 x 2460 x 0.7