Precision Developing

For over 3 decades, Toho Technology has developed, produced and innovated Wet Process systems to meet the ever changing and stringent demands of the Displays and Medical Imaging markets. For the customer who demands best value, flexible configuration and Precision Developing results, Toho Developers are used in a variety of applications including the Development of positive/negative photo resist in the array process. Developers are also provided for Black Matrix PS (photo spacer) positive/negative RGB resists and Black Matrix Color Filter processes. Toho Technology Wet Process Solutions offer outstanding value with additional benefits that make Toho the clear best choice for long term intensive performance.

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Accommodating substrates as large as 3050 x 2850, Toho Developers are designed for optimum develop uniformity and process control. The common modular process configurations below are enhanced and customized to meet budget and application needs while taking advantage of second to none quality manufacturing and “kaizen” production methods developed in Japan for the Asian Flat Panel Display industry.

Toho Overflow 3-Way Develop Module

(Spray, Puddle, Immerse)

• Develop Agent cascades down sloped plane to PUDDLE on substrate

• Develop Agent SPRAY onto substrate

• Substrate IMMERSE into Develop Agent

• Maximum uniformity of develop over substrate surface

• Provides flexibility by allowing Develop to adapt to different films and patterns

Common Modular Process Configuration

(common sequential flow – items 1 ~ 10)

1. Robot Load / Un-load, Manual Load, Indexed Elevator

2. Loader Conveyor

3. Buffer to prevent cross contamination

4. Develop Chamber

5. Cascade Rinse with separate supply of the final cascade module

6. Final DIW Rinse

7. Air Knife high pressure CDA or N2

8. Un-Load

9. Hot Plate / Cold Plate modules

10. Auxiliary Components

  • Control Cabinet
  • Chemical Distribution Unit

Toho Quality Build

• Modular PP Construction

• Easy access Maintenance openings

• Double glass covers

• Fully enclosed Process Chambers

• Positive air pressure

• Built in exhaust

• Multiple safety interlocks, leak sensors, exhaust sensors, over-heat, dry pump and other built in safety systems

• All piping, labeled for flow directions, pressure, etc.

• All wiring labeled and clearly marked out

Based on our experience with complex Wet Process equipment, Toho Technology Wet Process Solutions meet stringent specifications designed for the Flat Panel Display industry but allow for modular customization to fit all applications. While each machine is engineered at the component level to meet individual customer requirements, Toho systems offer outstanding reliability and flexible process control. User Programmable features ensure consistent processing and monitoring while a wide variety of adjustable parameters allow for optimum utilization of Fab assets.

Full Range Spec Capabilities

• Substrate sizes up to G10

• Experience with AZ, TOK, Semiclean strip agents

• Substrate thickness capabilities from 0.7mm +

Process Monitor Control

• Panel & Cassette ID Reading / Correlated to Recipe Settings

• TACT time per Process module, Develop, Rinse, Dry ,etc

• Panel movement and presence

• Direction, Speed, Pressure, Chemical Concentration for all Wet modules

• Develop Agent Mix, Dispense and Recycle

• Data logging, Error Logging

• Resistivity, Ph

• Temperature Monitors in plumbing, tanks and etch chambers to insure consistency

All Toho Develop Tools are Simple to Operate and feature easy to understand user interface, gauges, and fully labeled components. Toho Technology Wet Process Solutions offer outstanding value with additional benefits that make Toho the clear best choice for long term value and performance. High-performance Developing equipment with Toho process technology ensures best Develop results. Process Engineers who select Toho Equipment enjoy product enhancements and benefits such as;

Outstanding Customer Support

• Maintenance & Operations Training at Source & Site acceptance

• Training for all Preventative Maintenance & Repair techniques

• Bilingual Assistance as needed

• Trained Service Technicians on-site during and after installations

• Local US Service Technician Presence

• Optional Remote Access software for troubleshooting and programming assistance

• PLC programming support

• Global Compliance

  • NFPA codes and regulations, NEC, OSHA
  • CE Compliance as needed
  • SEMI S2-93A

Engineered for Quality & Performance

• Designed with Japanese Quality Standards and attention to detail and workmanship

• Low Cost of Ownership with best in class material grades

• User Friendly Software Interface customized to unique applications

• Reduced Environmental impact with noise suppression, filtration systems and re-circulation systems

• N2 Purge to Prevent bacteria build up

• ESD Suppression with Ionizer bars at Un-Load

• Automatic Chamber cleaning

• Automatic line purge

Flexible Modular Configurations

• Engineered for throughput, facility requirements

• Full Pre-Assembly Spec Review for customer Engineering and Material changes

• Lower Throughput Applications

• Stand alone systems

• Limited footprint requirements

• Manual Load / Unload

• Bacteria Prevention systems to stop water born contaminants

For the customer who demands best value, flexible configuration and Precision Developing results, Toho Developers are used in a variety of applications including the Development of positive/negative photo resist in the array process. Developers are also provided for Black Matrix PS (photo spacer) positive/negative RGB resists and Black Matrix Color Filter processes. All Toho Develop tools are customized to meet virtually any footprint, substrate size and thickness. Some examples of common FPD Develop Applications and Chemistry that Toho has experience with are listed below.

WET PROCESS EQUIPMENT Precision Developing
Applications
       
Process Configuration Develop Agent Film Panel Size
Puddle and Spray TMAH Photo Resist 800 x 1330 x 1.8
Spray Na2Co3 Phosphor 730 x 920 x 1.8
Spray KOH Color Resist 710 x 1070 x 0.7
Spray PD,CD,SD Color Resist 680 x 880 x 0.7 
Spray PD,CD,SD Color Resist 550 x 670 x 0.7
Dip KOH Emitter 370 x 470 x 0.7
Spray Na2Co3 Phosphor 370 x 470 x 0.7
Spray and Immerse KOH Emitter 370 x 470 x 0.7
Spray Na2Co3 Color Resist 370 x 470 x 0.7
Spray Na2Co3 Phosphor 370 x 320 x 0.7
Spray KOH Color Resist 360 x 600 x 0.5
Spray Na2Co3 Phosphor 1000 x 1400 x 2.8
Spray PD,CD,SD Color Resist 1000 x 1100 x 0.7