FP Series Contact Profiler

Toho custom profilers offer comprehensive measurement capabilities for mass production and research facilities that demand accuracy, performance and value.

Incorporating KLA-Tencor’s proprietary low-force measurement head, Toho Profilers provide low stylus force and achieve highly accurate micron to nanometer range measurements to analyze surface flatness, surface roughness, waviness, peak to valley, curvature, texture, stress, and feature dimensions on any square FPD substrate larger than 300mm.

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Spec Sheet

Toho Profilers provide industry leading measurement repeatability and features configured to your specific application and price range. Enhancing tool value and Material Characterization performance Toho also provides various options to the standard platform.

Standard Features

Substrate Accommodation

Toho Profilers fit all applications with smaller substrate systems featuring an X, Y, axis moving stage and larger systems utilizing gantry positioned heads

KLA-Tencor Micro Head

With outstanding patented measurement technology, best in class profilometry is achieved with exceptional stylus sensitivity

Stylus Profiling

The standard L-Stylus (2µm, 60°) allows for precision scanning with force ranges from 0.5mg to 15mg providing up to 90mm continuous scan length at 25mm per second. Stage area

Repeatability

Excellent and reliable measurement reproduction featuring scan repeatability of 10 Å at center stage

Sequence Data Base manager

Optical

Color camera for clear searching and scanning

Options & Accessories

• CIM System

• Off-line software

• Auto Pattern Recognition

• 3D imaging

• Stress Measurement

• Resistivity 4-Point Probe

• UPS unit

• VLSI Standard

• Spare L-Stylus

Engineered for precision Profile performance for small glass panels up to the largest currently in use, Toho Technology has engineered stand alone Models for measuring small substrates as well as the largest G10 glass measuring up to 3 x 2.8 meters. Depending on sample size, A-Type systems or X-type systems are offered with variations of stationary or moving measurement heads and stage configurations. Generally, substrates less than G4 sizes can be accommodated with the A-Type Profiler

A-type: Head Stationary / Stage moves (G4 or smaller sample size)

FP Series Contact Profilers Specification                           Toho FP - A-type
   
Performance  
Stylus Force Resolution 0.05 mg
Scan Repeatability 10Å (at stage center)
X and Y Repeatabilitiy ± 2 µm
Pattern Recognition Manual (Auto / option)
Magnification Lens 185 x
  0 – 360 degree
Noise Isolator Equipped (Passive or Active)
Scan Length Max 30 mm
Scan Speed 1µm / sec ~ 25mm / sec
Sampling Rate 50 / 100 / 200 / sec
Throat Height 15 mm
Vertical Range 0 – 130 µm
L – Stylus 2 µm / 60 degrees
Stylus Force 0.5 mg – 15 mg
Hardware Configuration  
Sample Size (mm) 300mm to 880mm
X, Y movement Moving Stage (X, Y)
  Lead screw + DC servo motor
Z movement Slide block + LM guide
THETA movement Wheel & Wormgear + DC servo motor
Facilities Requirements2  
Dimensions 1300 x 1300mm
Weight 800kg
Electrical 1φ100V-200V±10%
CDA 15L/min
Vacuum 15L/min
Floor condition VC-D
   
   
  Notes:
  1 30mm available only when Stress option is included. With no stress option, scan length is 10mm.
  2 dependant on sample size
   

X-type: Head Moves / Stage is stationary (G4.5 or larger sample size)

FP Series Contact Profilers Specification                           Toho FP - X-type
   
Performance  
Stylus Force Resolution 0.05 mg
Scan Repeatability 15Å (at any location)
X and Y Repeatabilitiy ± 2 µm
Pattern Recognition Auto
Magnification Lens 185 x
  0 – 90 / -90 degrees
Noise Isolator Equipped (Passive or Active)
Scan Length Max 30 mm1
Scan Speed 1µm / sec ~ 25mm / sec
Sampling Rate 50 / 100 / 200 / sec
Throat Height 15 mm
Vertical Range 0 – 130 µm
L – Stylus 2 µm / 60 degrees
Stylus Force 0.5 mg – 15 mg
Hardware Configuration  
Sample Size (mm) 920mm  to 3080mm
X, Y movement Moving Stage (X) & Moving Head (Y)
  Scale + AC servo motor
Z movement Slide block + LM guide + Million guide
THETA movement Built-in motor guide + AC servo motor
Facilities Requirements2  
Dimensions 2300 x 2400mm
Weight 5500kg
Electrical 3φ200V±10%
CDA 250L/min
Vacuum 30L/min
Floor condition VC-C
   
   
  Notes:
  1 30mm available only when Stress option is included. With no stress option, scan length is 10mm.
  2 dependant on sample size
   
   

Theory: Scanning Mechanism

To precisely scan features on various substrates on the A-type models, the Toho FP series utilize a specialized scanning system which primarily consists of an X-drive assembly and an optical flat. The X-drive is equipped with two motors, (slow / fast) that allow for more efficient scanning. The optical flat allows for the stylus to trace a pattern on a wide variety of samples in a straight line.

Theory: Measurement

The Patented Micro Head uses an “L-Stylus” that achieves a pattern trace with precise appropriate force. Depending on the material of the pattern being measured, this force is carefully controlled to prevent damage to the sample and the stylus. The sensor in the head detects the subtle movement of the stylus and the data captured in the Micro Head is then sent to the computer for manipulation.

Toho Profilers are designed to provide accurate profile measurements within applications geared toward FPD large surface area substrates.

• Thin film heights

• Thick film heights

• Photo resist / soft films

• Characterization of surface roughness or waviness

• Surface Curvature and form

• 2D stress on thin films

• Peak to Valley Dimension analysis

• 3D imaging

• Flatness

• Defect Analysis

Engineered for precision profile performance, Toho Technology has engineered stand alone systems for measuring small substrates as well as the largest G10 glass measuring up to 3 x 2.8 meters. Depending on sample size, A-Type systems or X-type systems are offered with variations of stationary or moving measurement heads and stage configurations. Generally, substrates less than G4 sizes can be accommodated with the A-Type Profiler.

FP-20 Series

X-type: Head Moves / Stage is stationary (G4.5 or larger sample size)

With larger glass panels, noise can be generated with sample handling. The X-type FP series solves this issue with a moveable Micro Head.

The measurement table only has an X axis and a granite gantry hangs the scanner with the Micro Head with a Y axis. This structure allows for faster measurement site with more reliable data at all points on the sample. The scanner moves the Micro Head over the measurement table to measure the pattern while the table is fixed.

FP-10 Series

A-type: Head Stationary / Stage moves (G4 or smaller FPD sample size)

With smaller glass substrates, the original KLA-Tencor design with the moveable stage is used. Under the measurement table there are 2 lead screws (X and Y) for location of a measurement point and for the scanner that moves for a measurement while the Micro Head with the stylus is fixed over the table. This type is suitable for smaller samples and limited footprint requirements.